CMOS-integrated, cantilever-based sensor devices: the Biofinger Project

J. Lichtenberg, J. Bausells, A. Baro, M. Crowley, L. McDonnell, C.O’Farell, A. Gill, Y.Li, A. Garcia Lostao, F. Perez Murano, A. Sheehan, W.H. Song, C. Vancura, T. Volden, G. Villanueva, M. Zimmermann. CMOS-integrated, cantilever-based sensor devices: the Biofinger Project. Proceedings Nanochemical Sensors Workshop. : , 2004. Vol., p.24-34