Focused Electron Beam Induced Etching of Titanium with XeF2

F. J. Schoenaker, R Córdoba, R. Fernández-Pacheco, C. Magen, O. Stéphan, M. R. Ibarra, J. M. De Teresa. Focused Electron Beam Induced Etching of Titanium with XeF2. Nanotechnology. 2011, Vol. 22, p. 265304-2011.